Scale name | Accuracy | Scale pitch | Thermal expansion
coefficient at 20 °C |
Max length of scale | Readhead compatilibity |
RELM/RELE | ±1 µm for up to 1 m, then ±1 µm/m | 20 µm | 0.75 ±0.35 µm/m/°C | 1.5 m | VIONiC, VIONiCplus, TONiC, TONiC UHV, SiGNUM |
RELA | As above | 30 µm | As above | 1.5 m
|
RESOLUTE, RESOLUTE UHV, RESOLUTE FS |
ZeroMet spar